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Canon Introduces 5nm-Capable Nano-Imprint Lithography Machine

Japan’s Canon Inc. has shipped a nano-imprint lithography platform for semiconductor manufacturing – the FPA1200NZ2C – to the Texas Institute for Electronics, m...

By：EE Newsroom Oct 12, 2024

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Canon Introduces 5nm-Capable Nano-Imprint Lithography Machine

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Canon Introduces 5nm-Capable Nano-Imprint Lithography Machine

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